Micro-And Nanostructures. Design And Preparation

Micro-and nanostructures such as planar devices (Micro/Nano - Electromechanical Systems - MEMS and NEMS), planar micro and nanowires, magnetoresistive pillars, samples for Transmission Electron Microscopy (TEM), etc., are designed and geometrically structured by Laser Lithography, Electron Beam Lithography, ionic and in plasma etching techniques.

The following equipment is used for the preparation of the micro and nanostructures: